The advancing miniaturization and the integration of diverse techniques and functionalities play an important role for the development of novel technologies and products. The fabrication of micro optical components and their integration into micro systems can often be accomplished by direct laser processing. The machining of glass materials usually requires wavelengths in the deep UV range (193 nm or 157 nm).
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Laser-Laboratorium Göttingen e.V. (LLG)
Head of the Department
Dr. Peter Simon
"Short Pulses / Nanostructures"
Contact person for
Nano Structure Technology:
Dr. Jürgen Ihlemann