With the help of highly excited laser-induced plasmas as compact light sources, metrology tools for the EUV/XUV spectral range (λ=1…30nm) are being developed within the department. These sources and tools enable laboratory scaled setups e.g. for spectrometry, reflectometry or stability tests independent of synchrotron radiation leading to the capability of in-house EUV/XUV material studies.
Some short wavelength research activities of our group are shown in the following presentation being available for free download as pdf-file.
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