Department "Optics / Short Wavelengths"

The Optics / Short Wavelengths department is concerned with the characterization of laser light sources as well as high quality optics for beam steering and shaping. One focus is put on the deep UV wavelengths (193 nm, 248 nm) relevant for semiconductor microlithography; all other laser relevant wavelengths are also available. In order to characterize quality and radiation stability of optical components, e.g. absorption, thermal lensing, damage thresholds and long-term degradation we operate several measuring instruments. Furthermore, propagation and coherence properties of laser radiation are measured with high-resolution wavefront sensors. Moreover, compact laser-driven plasma sources are developed in order to generate extreme ultraviolet (EUV) radiation and soft x-rays being used for several metrological applications such as absorption spectroscopy (NEXFAS), reflectometry and microscopy within the ‘water window’ (λ = 2.2 – 4.4 nm). In addition, stability and damage threshold measurements are conducted for EUV relevant materials and sensors at λ = 13.5 nm using appropriate beam shaping optics.

Rules

Only words with 2 or more characters are accepted
Max 200 chars total
Space is used to split words, "" can be used to search for a whole string (not indexed search then)
AND, OR and NOT are prefix words, overruling the default operator
+/|/- equals AND, OR and NOT as operators.
All search words are converted to lowercase.


Laser-Laboratorium Göttingen e.V. (LLG)

Contact person:

Head of department
Dr. Klaus Mann
"Optics / Short Wavelengths"

Tel.: +49(0)551/5035-41
FAX: +49(0)551/5035-99
kmann(at)llg-ev.de