Short pulse laser development

The system architecture for the generation of energetic femtosecond pulses in the UV is displayed below. Pulses out of a commercially available short pulse laser source (e.g. a Ti:sapphire oscillator/amplifier arrangement) are frequency tripled to 248.5 nm and then amplified in a special excimer amplifier module. Depending on custom requirements such a module can be optimized for different performance characteristics.