Phase controlled multiple beam interference

For the fabrication of periodic nanostructures it is straightforward to apply interferometric processing techniques. According to this approach a laser beam is subdivided into partial beams which are then recombined on the sample surface by means of an appropriate optical system. Applying a high enough intensity, the resulting interference pattern leads to a spatially periodic material ablation. The shape of the intensity distribution can be controlled by the intersection angle, the relative intensities, the polarization and also the phase relationship of the partial beams.

Figure 1: Principle of surface structuring by phase controlled multiple beam interference

A newly introduced scheme what we call phase controlled multiple beam interference, provides an easy means to change the relative phases of the interfering beams, thus allowing the fabrication of a great variety of complex structures.

Figure 2: Complex suface structures fabricated by phase controlled multiple beam interference