C. Peth: Georg-Simon-Ohm-Preis, awarded by Deutsche Physikalische Gesellschaft for the best Fachhochschul-Diploma in Germany 2003

M. Lübbecke: Ansteuerung eines adaptiven Spiegels zur Laserstrahlformung, Diploma, University of Applied Science Harz, February 2001, awarded with the Diplom-Preis by the Association for Electrical, Electronic & Information Technologies

Klaus Mann, Maik Lübbecke: Leistungsmessgerät und Verfahren zur Messung optischer Strahlungsleistung, Patentschrift / Offenlegungsschrift DE 10 2005 026 833.1-52 (2005)

Optical pulse stretching and smoothing for ArF and F₂ lithography excimer lasers, U.S. patent 6,389,045 B1 (Mai 2002)

Verfahren und Vorrichtung zur Streulichtmessung, 19950272.2-52, Deutsches Patentamt, Erteilung November 2001

Verfahren zur gleichzeitigen Messung der Intensitäts-, Wellenfront- und Richtungsverteilungen von paraxialen optischen Strahlungsfeldern, Deutsches Patentamt (Juni 2001)

VUV Laser Beam Characterization system, U.S. patent appl. No. 60/181, 156 (Februar 2000)

Stabilization of angular and lateral laser beam position, U.S. Patent appl. No. 09/162,424 (1998)

J. Thieme, C. Peth, J. Sedlmaier, S.-C. Gleber, K. Mann, XANES Spectroscopy of soil samples with a laser plasma x-ray source, In Vorbereitung

C. Peth, W. Quevedo, F. Barkusky, G. Busse, K. Mann, S. Techert: Time-resolved soft x-ray diffraction experiments using a laser-driven plasma source, In Vorbereitung

F. Barkusky, A. Bayer, K. Mann, J. John, P. Malinowski: Responsivity and Radiation Hardness of AlGaN Detectors for Applications in the EUV wavelength range, to be submitted to J. Appl. Phys (in progress)

F. Barkusky, A. Bayer, C. Peth, K. Mann: Direct photo-etching of various polymers using high fluence radiation from a table-top extreme ultraviolet plasma source, J. Appl. Phys., 105, 014906 (2009)

G. Vakili Dastjerd: Entwicklung eines auf EUV-Strahlung basierten Desorptionssystems zur massenspektrometrischen Untersuchung biologischer Proben, Diplomarbeit, FH Hildesheim / Holzminden / Göttingen (HAWK), 2008

C. Peth: XUV-Laserplasmaquellen für die Absorptions-Spektroskopie und zeitaufgelöste Röntgenbeugung, Dissertation, Universität Göttingen, 2008

J. Gloger: Optimierung des Hartmann-Shack Sensors mittels Talbot-Effekt und Messung laser-induzierter Anisotropie von Quarzglas, Diplomarbeit, FH Hildesheim / Holzminden / Göttingen (HAWK), 2008

K. Mann, A. Bayer, U. Leinhos, B. Schäfer: Photo-thermal measurement of absorption and wavefront deformations in fused silica, Proc. of SPIE, 7132, 7132-51 (2008)

A. Bayer, F. Barkusky, S. Döring, B. Flöter, C. Peth, K. Mann: Active Beam Control for the EUV/XUV Spectral Range Using an Adaptive Kirkpatrick-Baez-Arrangement, Proc. of SPIE, 7100A-53 (2008)

E. Novakova, G. Mitrea, C. Peth, J. Thieme, K. Mann, T. Salditt: Solid supported multi-component lipid membranes studied by x-ray spectro-microscopy, Biointerphases, 3, FB44 (2008)

C. Peth, F. Barkusky, K. Mann: Near-edge X-ray absorption fine structure measurements using a laboratory-scale XUV source, Journal of Physics D: Applied Physics, 41 105202 (2008)

K. Mann, A. Bayer, U. Leinhos, B. Schäfer: A novel photo-thermal setup for determination of absorptance losses and wavefront deformations in DUV optics, Proc. of SPIE, 6924, 6924-98 (2008)

A. Bayer, F. Barkusky, U. Leinhos, T. Miege, B. Schäfer, K. Mann: Characterization of Absorptance Losses in Optical Materials Using a High Resolution Hartmann-Shack Wavefront Sensor, Proc. of SPIE, 6879, 6879-46 (2008)

C. Peth, F. Barkusky, J. Sedlmair, S.-C. Gleber, E. Novakova, J. Niemeyer, J. Thieme, T. Salditt, K. Mann: Near-Edge X-Ray Absorption Fine Structure Measurements Using a Laser Plasma XUV Source, X-Ray Microscopy Proceedings 2008

J. Sedlmair, S.-C. Gleber, C. Peth, K. Mann and J. Thieme: NEXAFS spectroscopy with a laser plasma x-ray source on soil samples, X-Ray Microscopy Proceedings 2008

F. Barkusky, A. Bayer, C. Peth, K. Mann: Direct Photo-Etching of PMMA by Focused EUV Radiation From a Compact Laser Plasma Source, Proc. of SPIE, 6879, 6879-39 (2008)

F. Barkusky, C. Peth, A. Bayer, K. Mann: Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source, Journ. Appl. Phys. 101, 124908 (2007)

C. Peth, A. Kalinin, F. Barkusky, K. Mann, J.P. Toennies, L. Rusin: XUV laser-plasma source based on solid Ar filament, Rev. Sci. Instr. 78, 1 (2007)

A. Bayer, F. Barkusky, C. Peth, H. Töttger, K. Mann: Compact EUV Source and Optics for Direct Structuring of Surfaces, Photonics West: LASE 2007, Proceedings of SPIE Vol. 6458, 64580Z (2007)

B. Schäfer, K. Mann: Accuracy of laser beam parameters and propagation from real-time Hartmann-Shack experiments, Photonics West: LASE 2007, Proceedings of SPIE Vol. 6452, 6452-2 (2007)

K. Mann, T. Miege, U. Leinhos, and B. Schäfer: Characterization of absorptance losses and wavefront deformation in DUV optics SPIE Proc. of ‚Int. Symp. on Advanved Lithography‘, San Jose, Ca (USA), März 2007

F. Barkusky, A. Bayer, C. Peth, H. Töttger, K. Mann: Compact EUV source and Schwarzschild objective for modification and ablation of various materials, SPIE Europe, Proc. Of SPIE, Vol. 6586, 6586-10 2007

K. Mann, A. Bayer, T. Miege, U. Leinhos, and B. Schäfer: A Novel Photo-Thermal Setup for Evaluation of Absorptance Losses and Thermal Wavefront Deformations in DUV Optics, Proceedings of the 39th Boulder Damage Symposium, Boulder, Co (USA), SPIE Vol. 6720, 6720-72 (2007)

B. Kühn, S. Kaiser, T. Miege, B. Uebbing, K. Mann: Minimizing Losses in Synthetic Fused Silica for Immersion Lithography, 4. Symposium on Immersion Lithography, Keystone, Co (USA) Okt. 2007

K. Mann, B. Schäfer: Photothermisches Verfahren für Hartmann-Shack-Sensor; Neue Absorptionsmessungen, Optolines 16, 8-9 (2007)

K. Mann u.a.: Röntgenoptische Systeme, VDI/VDE-Richtlinie, VDI/VDE 5575, Dezember 2007

T. Miege: Charakterisierung thermisch belasteter Optiken mit einem Hartmann-Shack Wellenfrontsensor, Diplomarbeit, FH-Merseburg, 12/2006, 01/2007

H. Töttger: Charakterisierung von Gas-Targets mittels Wellenfrontsensorik zur Optimierung laserproduzierter EUV-Plasmen, Masterarbeit, FH Holzmin­den/Hildesheim/Göttingen (HAWK), 03/2007

B. Schäfer, M. Lübbecke, K. Mann: Hartmann-Shack Wavefront measurements for real time determination of laser beam propagation parameters, Rev. Sci. Instr., 77, 1, 2006

B. Schäfer, M. Lübbecke, K. Mann: Propagation Analysis of laser beams from Hartmann-Shack measurements, Proc. of SPIE, Vol. 6343, 634348, 2006

A. Bayer, F. Barkusky, C. Peth, H. Töttger, K. Mann: Compact EUV Source and Optics for Applications apart from Lithography, Proc. of SPIE, Vol. 6317, 631706, 2006

F. Barkusky, C. Peth, A. Bayer, K. Mann: Ablation of PMMA using focused extreme ultraviolet radiation from a table-top laser-induced plasma source, J. Appl. Phys., submitted

K. Mann, F. Barkusky, A. Bayer, C. Peth, H. Töttger: Compact source and beam delivery system for EUV radiation, Proc. of SPIE, Vol. 6151, 615166, 2006

K. Mann, U. Leinhos, B. Schäfer: Characterization of absorption losses in deep UV optical materials, Proc. of SPIE, Vol. 6403, 640379, 2006, Boulder

C. P. Hauri, J. Biegert, and U. Keller, B. Schaefer, K. Mann, and G. Marowsky: Validity of wave-front reconstruction and propagation of ultrabroadband pulses measured with a Hartmann–Shack sensor, Optics Letters 30 (12) 1563 (2005)

Ch. Görling, U. Leinhos, and K. Mann: Surface and bulk absorption in CaF₂ at 193 nm and 157 nm, Opt. Commun. 249/1-3, 319 (2005)

M. Kunzmann, B. Schäfer, K. Mann: Charakterisierung von Laserstrahlung mit dem Wellenfrontsensor, in: Photonik 1 (2005)

B. Schäfer, K.Mann, G. Marowsky, C.P. Hauri, J. Biegert, U. Keller: Characterisation, Wavefront Reconstruction and Propagation of Ultra-broadband Laser Pulses from Hartmann-Shack Measurements, DGaO-Proceedings zur 106. Jahrestagung, Online-Journal Arrayhttp://www.dgao-proceedings.de/archiv/106_chronologisch_d.php (2005)

F. Barkusky, C. Peth, K. Mann, T. Feigl, N. Kaiser: Direct writing of color centers in LiF using a laser-induced EUV plasma in combination with a Schwarzschild objective, Rev. Sci. Instr. (2005)

B. Schäfer, K. Mann: Laserstrahl-Charakterisierung in Echtzeit: Hartmann-Shack-Wellenfrontsensor, Optolines 7 (3), S. 6 (2005)

K. Mann: Compact source and beam delivery system for EUV radiation using a Schwarzschild objective, Proceedings of SPIE, Annual Meeting

B. Schäfer, K.Mann, G. Marowsky, C.P. Hauri, J. Biegert, U. Keller: Characterisation, Wavefront Reconstruction and Propagation of Ultra-broadband Laser Pulses from Hartmann-Shack Measurements, Proceedings of SPIE Vol. 5918, p. 194-202 (2005)

A. Bayer, F. Barkusky, C. Peth, H. Töttger, K. Mann, T. Feigl, N. Kaiser: Imaging properties of different optics for EUV radiation, Proceedings of SPIE Vol. 5962, p. 59620R-1-59620R-12 (2005)

S. Döring: Konzeption, Aufbau und Inbetriebnahme eines Reflektometers für den EUV-Bereich unter Verwendung einer laserinduzierten Plasmaquelle, Diplomarbeit, Universität Göttingen, 2005

B. Reiter: Preparation and Characterisation of a Cryogenic Filament as a Laser Target for the Production of EUV and Soft X-ray Plasmas, Diplomarbeit Fachhochschule Hildesheim/Holzminden/Göttingen

B. Abel, J. Aßmann, M. Faubel, K. Gäbel, S. Kranzusch, E. Lougovoj, K. Mann, T. Mißalla, Ch. Peth: Characterization of extreme ultraviolet light emitting plasmas from a new laser excited fluorine containing liquid polymer jet target, J. Appl. Phys. 95 (12), 7619 (2004)

R. Grunwald, U. Neumann, V. Kebbel, H.-J. Kühn. K. Mann, U. Leinhos, H. Mischke, D. Wulff-Molder: VUV beam array generation by flat microoptical structures, Opt. Lett., 29, 977-979 (2004)

K. Mann, F. Barkusky, S. Döring, S. Kranzusch, A. Meyer, C. Peth: Compact laser-induced EUV source for metrology, Proc. of Emerging Lithographic Technologies, Santa Clara (USA), SPIE, 5347, 423 (2004)

C. Peth, S. Kranzusch, K. Mann: Characterization of gas targets for laser produced extreme ultraviolet pasmas with Hartmann-Shack sensor, Rev. Sci. Instr. 75 (10), 3288 (2004)

C. Görling, U. Leinhos, K. Mann: Self-trapped exciton luminescence and repetition rate dependence of two-photon absorption in CaF₂ at 193 nm, Opt. Commun. 216, 369 (2003)

C. Görling, U. Leinhos, K. Mann: Characterization of CaF2 crystals by measurement of absorption and laser-induced luminescence at 193 nm and 157 nm, in: VDI-Technology Center: Instruments and Standard Test Procedures for Laser Beam and Optics Characterization: CHOCLAB II, 268 (2003)

U. Natura, Ch. Mühlig, W. Triebel, Ch. Görling, U. Leinhos, K. Mann, E. Eva, A. Pfeiffer: Characterization of 193 nm light absorption in fused silica and calcium fluoride by various measurement techniques (Round Robin experiments), a.a.O., 280

B. Schäfer, K. Mann: Laser beam characterization with Hartmann-Shack wavefront sensors, a.a.O., 58

R. Mästle, A. Letsch, A. Giesen, J. Pfund, J. Schwider, B. Schäfer, K. Mann: Results of a ‚Round Robin’ Experiment on Laser Beam Characterization with Hartmann-Shack and Hartmann Wavefront Sensors, a.a.O., 81

S. Kranzusch, C. Peth, K. Mann: Spatial characterization of EUV-plasmas generated by laser excitation of xenon gas target, Rev. Sci. Instr., 74, 969, 2003

C. Peth, S. Kranzusch, M. Kramer, K. Mann: Plasmacharakterisierung im EUV-Spektralbereich, Fortschritt-Berichte VDI, Reihe 17, Nr. 231, Physikalische Methoden der Laser- und Medizintechnik, VDI-Verlag, 2003

C. Peth, S. Kranzusch, K. Mann: Metrologie im extrem-ultravioletten Spektralbereich, Physik Journal, 7 / 2003

S. Kranzusch: Erzeugung und Charakterisierung laser-induzierter Plasmen im extrem-ultravioletten Spektralbereich, Dissertation Universität Göttingen, Cuvillier Verlag Göttingen (2003)

C. Görling: Wechselwirkungsmechanismen von DUV- und VUV-Laserstrahlung mit fluoridischen Einkristallen, Dissertation Universität Göttingen, Cuvillier Verlag Göttingen (2003)

C. Görling, U. Leinhos, K. Mann: Comparative studies of absorptance behaviour of alkaline-earth fluorides at 193 nm and 157 nm, Appl. Phys. B, 74, 259 (2002)

Ch. Görling, U. Leinhos, K. Mann: Comparative studies of absorptance behaviour and laser-induced fluorescence of alkaline-earth fluorides at 193 nm and 157 nm, Proc. of XXXIII Symposium on Optical Materials for High Power Lasers, Boulder (USA), 2001, SPIE 4679, 339-346 (2002)

Ch. Görling, U. Leinhos, K. Mann: Repetition rate dependence of two-photon absorption and self-trapped exciton luminescence in CaF₂ at 193 nm, Proc. of XXXIV Symposium on Optical Materials for High Power Lasers, Boulder (USA), 2002, SPIE 4932

B. Schäfer, K. Mann: Determination of beam parameters and coherence properties of laser radiation by use of an extended Hartmann-Shack wavefront sensor, Appl. Opt., 41 (15), 2809-2817, 2002

B. Schäfer, K. Mann: Erweiteter Hartmann-Shack-Wellenfrontsensor zur Bestimmung von Strahlparametern und räumlicher Kohärenz von Laserstrahlung, Laseropto, 6, 33, Dezember 2001

B. Schäfer, K. Mann: Estimation of beam parameters and coherence properties of laser radiation by use of an extended Hartmann-Shack wavefront sensor, Proc. LBOC, SPIE Vol. 4933, Boulder (USA), 2002

B. Schäfer, K. Mann: Determination of beam parameters and coherence properties of laser radiation by use of an extended Hartmann-Shack wavefront sensor, Proc. Photonics Asia – Adaptive Optics and Applications II, SPIE Vol. 4926, 150-161, 2002

K. Mann, S. Kranzusch, G. Eckert, C. Peth, B. Schäfer: Development of diagnostic tools fort he EUV spectral range, Proc. of Emerging Lithographic Technologies V 2002, Proc. SPIE Vol. 4688, 354-362

K. Mann, S. Kranzusch, G. Eckert, C. Görling, U. Leinhos, C. Peth, B. Schäfer: Optical metrology in the VUV and EUV spectral range, Proc. of Emerging Lithographic Technologies V 2002, Proc. SPIE Vol. 4779

S. Kranzusch, K. Mann, C. Peth: Plasma characterization in the extreme ultraviolet spectral range, Proc, of Emerging Lithographic Technologies V 2002, Proc. SPIE Vol. 4781

S. Kahl, V.P. Denysenkov, S.I. Khartsev, S. Kranzusch, A.M. Grishin: Influence of the laser repetition rate on crystalline structure, composition, and magnetic properties of laser deposited Y₃Fe₅O₁₂/Gd₃Ga₅O₁₂(111) films, Mat. Res. Soc. Symp. Proc. Vol. 720, 2002

C. Peth: Aufbau und Charakterisierung eines gepulsten, laser-gestützten Gas-Targets zur Erzeugung weicher Röntgenstrahlung, Diplomarbeit, Fachhochschule Hildesheim/Holzminden/Göttingen, 2002

O. Apel, K. Mann: DUV scattering measurements as a tool for characterization of UV-optical surfaces, Appl. Phys. A, 72, 59, 2001

B. Schäfer, K. Mann: Laserstrahlcharakterisierung mit dem Hartmann-Shack-Wellenfronsensor, LaserOpto, 32 (6), 47, Dez. 2000

K. Mann, O. Apel, G. Eckert, C. Görling, U. Leinhos, B. Schäfer: Testing of optical components for microlithography at 193 nm and 157 nm, Proc. of ‘Optical Microlithography XIV’, Santa Clara (USA), SPIE Vol. 4346, Februar 2001

B. Schäfer, K. Mann: Characterization of laser beams using a Hartmann-Shack wavefront sensor, Proc. of 6^th Int. Workshop on Laser Beam and Optics Characterization (LBOC), München, Juni 2001

B. Schäfer, G. Marowsky: Auf die Wellenfront kommt es an, Neue Zürcher Zeitung, 18. April 2001

B. Schäfer, K. Mann: Lasers and laser-related equipment – Test methods for determination of the shape of a laser beam wavefront – Part 2: Hartmann-Shack sensors, ISO/CD 15367-2, Juni 2001

U. Leinhos, C. Görling, O. Apel, K. Mann: Characterization of absorptance-losses in optical components irradiated at 193 nm and 157 nm, Proc. of 6^th Int. Workshop on Laser Beam and Optics Characterization (LBOC), München, Juni 2001

U. Natura, C. Mühlig, W. Triebel, U. Leinhos, K. Mann, E. Eva, A. Pfeiffer: Characterization of 193 nm light absorption in fused silica by various measurement techniques, Proc. of 6^th Int. Workshop on Laser Beam and Optics Characterization (LBOC), München, Juni 2001

S. Kranzusch, K. Mann: Laser-induced EUV source for optics characterization, Proc. of Emerging Lithographic Technologies V 2001, Proc. SPIE 4343, 559-565 (2001)

S. Kranzusch, K. Mann: Chracaterization of laser-induced EUV plasma sources, Proc. of SPIE Vol. 4504, 114-120 (2001)

S. Kranzusch, K. Mann: Spectral characteristics of EUV radiation emitted from a laser-irradiated gas puff target, Opt. Comm., 200 (1-6), 223-230 (2001)

M. Lübbecke: Ansteuerung eines adaptiven Spiegels zur Laserstrahlformung, Diplomarbeit, Fachhochschule Harz, Februar 2001