EUV Radiation

With the help of highly excited laser-induced plasms as compact light sources, metrology tools for the EUV/XUV spectral range (λ=1…30nm) are being developed within the department. These sources and tools enable laboratory scaled setups e.g. for spectrometry, reflectometry or stability tests independent of synchrotron radiation leading to the capability of in-house EUV/XUV material studies.