Beam Profiling

Laser applications in industry and science often demand the highest beam stability as well as accurate spatial profile control. Thus, the determination of high resolution intensity distribution and beam parameters is essential.

The Optics / Short Wavelengths department offers the comprehensive characterization of laser beams over a broad spectral range. For this task camera-based systems for measurement of near-field and far-field profiles which are sufficient to calculate laser parameters according to ISO-norm (ISO 11146, ISO 13694, ISO 15367).

The optimized combination of UV converters with CCD cameras is suitable for important laser wavelengths from NIR (e.g. Nd:YAG) to DUV (ArF excimer laser) and EUV (13.5 nm).

: Measured beam profiles of a HeNe (left) and an excimer laser (right)

Beam analysis (NIR, Vis, UV, EUV)
Beam parameters according to ISO
Beam propagation / focusability
Pointing stability
M² (setup for caustic measurement)