Adaptive Optics / Optics Design

The development of beam guiding optics especially for the EUV range lead to pronounced activities in optics design with the help of ray tracing simulation (ZEMAX) in recent years. As an example a modified Schwarzschild objective is shown in figure 1 (BMBF project "KOMPASS").

: Figure 1: Calculated ray paths for a modified Schwarzschild-Objective with 10fold reduction. Primary and secondary mirror have annular shape, the image plane is directly behind the primary mirror located.

Ray tracing simulations with ZEMAX / Optalix
Production in own optics workshop
Accuracy of surface figure < 200nm

Current work is done on the illumination and imaging paths of a soft-X-ray microscope (project L-TXM).