Department Nanostructures

Materials processing by UV laser ablation enables the flexible fabrication of micro- and nano-structures, e.g. for microfluidic or optical applications. The department Nanostructures is concerned with the processing of various material classes by direct ablation (polymers, glass, ceramics, metals, semiconductors). Predominantly excimer lasers, F₂-lasers and UV-ultrashort pulse lasers are applied. Using mask projection or interference methods and choosing appropriate wavelength and pulse duration, sub-micron precision is obtained. Feature sizes down to 50 nm are feasible.

A main focus is placed on the laser based processing of thin optical films. Patterning by ablation as well as the morphological or chemical modification by laser radiation is investigated. The developed processes allow for the fabrication of precise topologies for applications in optics, photonics and bio-sensing. Phase masks, diffractive optical elements or waveguides are examples.

Key issues:

Laser micro- and nanostructuring
Micro optics
Biosensors