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Patente

Jan-Hendrik Klein-Wiele:
„Verfahren zur Nanostrukturierung eines Substrats”
DE 10 2006 023 940 (2009) - erteilt

Peter Simon, Jörg Meinertz, Jozsef Bekesi, und Jürgen Ihlemann:
„Oberflächenmodifikationsverfahren und -vorrichtung”,
DE 10 2006 032 053 (2009) - erteilt

Peter Simon, Tamas Nagy
„Lichtleiteranordnung, Herstellungsverfahren und Verwendung dafür”
DE 10 2007 048 769 (2009) - erteilt

Peter Simon, Jozsef Bekesi, Tamas Nagy:
„Verfahren zur Verbesserung der Strahlqualität eines Gasentladungslasers durch optimierte Kühlung und Gasentladungslaser-System”
DE 10 2006 000 889 (2008) - erteilt

J.-H. Klein-Wiele und Peter Simon:
„Vorrichtung zur Erzeugung eines periodisch hoch aufgelösten Beleuchtungs­musters”
DE 10 2005 027 046 (2006) - erteilt

Peter Simon, Jan-Hendrik Klein-Wiele
„Vorrichtung und Verfahren zur Strahlhomogenisierung von Ultrakurzpulslasern”
Patentschrift DE 102 49 532 (2003) - erteilt

Bastian Borchers, Peter Simon, Jürgen Ihlemann
„Verfahren zum Erzeugen eines periodischen Musters”
Offenlegungsschrift DE 10 2009 005 972.5(2009) - angemeldet

Peter Simon, Jan-Hendrik Klein-Wiele:
„Vorrichtung zur Erzeugung eines periodischen Beleuchtungsmusters und Verfahren zu deren Betrieb.“
DE 10 2008 038 591.3 (2008) - angemeldet

Jan-Hendrik Klein-Wiele:
„Vorrichtung und Verfahren zur Erzeugung von Strahlen mit variierbaren Phasen­beziehungen”
Offenlegungsschrift DE 103 28 314 A1 (2004) - angemeldet

Veröffentlichungen - 2009

T. Nagy, Peter Simon:
"Single-shot TG FROG for the characterization of ultrashort DUV pulses",
Opt. Express 17, 8144 (2009).

T. Nagy, Peter Simon:
"Generation of High-Energy Sub-20-fs DUV Pulses in Noble-Gas-Filled Hollow Fiber",
in The Conference on Lasers and Electro-Optics (CLEO)/The International Quantum Electronics Conference (IQEC) (Optical Society of America, Washington, DC, 2009), CFN7.

T. Nagy, Peter Simon:
"Generation and characterization of energetic sub-20-fs DUV Pulses",
in 2009 Conference on Lasers and Electro-Optics Europe & the European Quantum Electronics Conference (CLEO/Europe - EQEC 2009), CF7.3 THU.

T. Nagy, Peter Simon:
"Generation of 200-µJ, sub-25-fs deep-UV pulses using a noble-gas-filled hollow fiber",
Opt. Lett. >34, 2300 (2009).

Veröffentlichungen - 2008

T. Nagy, M. Forster, P. Simon:
„Flexible hollow fiber for pulse compressiors”
Applied Optics 47, 3264-3268 (2008)

J. Bekesi, J. Meinertz, J. Ihlemann, P. Simon:
„Fabrication of large area grating structures through laser ablation”
Appl. Phys. A, 93, 27 (2008)

P. Simon:
„Erzeugung periodischer Sub-Mikrometer-Strukturen durch Laserablation“
eingeladener Vortrag, Insitutskolloquium, Ferdinand-Braun-Institut, Berlin, März 2008

P. Simon:
„Fabrication of periodic nanostructures through direct laser ablation”
ISL 2008 International Symposium on Laser-Micromachining, November 2008, Chemnitz

J. Ihlemann, J. Békési, J.-H.Klein-Wiele, P.Simon:
„Processing of dielectric optical coatings by nanosecond and femtosecond UV laser ablation”
Laser Chemistry (2008)

Veröffentlichungen - 2007

J. Bekesi, J. Meinertz, J. Ihlemann, P. Simon:
„Grating Interferometers for Efficient Generation of Large Area Grating Structures via Laser Ablation”
Proceedings of LPM2007-the 8th International Symposium on Laser Precision Microfabrication, p 1-4, (2007)

J Ihlemann, J H Klein-Wiele, J Bekesi, P Simon:
„UV Ultrafast Laser Processing using Phase Masks”
Journal of Physics: Conference Series 59 449–452, (2007)

J. Ihlemann, J.-H. Klein-Wiele, J. Békési, P. Simon:
„SiO2 phase gratings fabricated by UV laser ablation patterning”
Proc. SPIE Vol. 6462B, paper # 41 (2007)

T. Nagy, M. Forster, P. Simon:
„Generation of high-energy sub-20 fs pulses at 248 nm”
CLEO/Europe 07 Conference on Lasers and Electro-Optics, Munich, paper CF5-2-WED (2007) 

J. Bekesi, J. Meinertz, J. Ihlemann, P. Simon:
„Fabrication of large area grating structures through laser ablation using a grating-interferometer setup”
COLA 2007, 9th International Conference on Laser Ablation, Tenerife, Spain, Technical Program, p.28

M.A. Bader, A. Selle, O. Stenzel, R. Delmdahl, G. Spiecker, C. Fischer:
"High spectral resolution analysis of tunable narrowband resonant grating waveguide structures",
Appl. Phys. B 89, 151–154 (2007)

Veröffentlichungen - 2006

J.-H. Klein-Wiele, T. Nagy, P. Simon:
„Hollow-Fiber Pulse Compressor for KrF Lasers”
Appl. Phys B 82, 567-570 (2006)

J.-H. Klein-Wiele, J. Bekesi, Peter Simon J. Ihlemann:
„Fabrication of SiO2 phase gratings by UV laser patterning of silicon suboxide layers and subsequent oxidation, The 4th International Congress on Laser Advanced Materials Processing”, LAMP 2006, May 16-19, 2006, Kyoto Research Park, Kyoto, Japan

J-H. Klein-Wiele :
„Fabrication of sub-wavelength-period nanostructures with UV femtosecond laser ablation, The 4th International Congress on Laser Advanced Materials Processing”, LAMP 2006, May 16-19, 2006, Kyoto Research Park, Kyoto, Japan

J.-H. Klein-Wiele, J. Békési, P. Simon, J. Ihlemann:
„Fabrication of SiO2 phase gratings by UV laser patterning of silicon suboxide layers and subsequent oxidation”, Journal of Laser Micro/Nanoengineering 1, 221 (2006)

Jan-Hendrik Klein-Wiele, Peter Simon:
„Enhancement of Laser Nano-Patterning of Semiconductors: Direct Ablation of PMMA Coated Silicon”, CLEO/QELS and PhAST 2006, May 21–May 26, 2006 Long Beach Convention Center, Long Beach, California

P. Simon:
„Material processing with UV femtosecond pulses, 1st International Symposium on Laser-Micromachining”, ISL Chemnitz, (2006)

J. Ihlemann, J.-H. Klein-Wiele, J. Békési, P. Simon:
„Laser fabricated SiO2 phase gratings for high resolution surface patterning, Proceedings of the EOS Topical Meeting on Micro-Optics, Diffractive Optics and Optical MEMS” (17 - 19 October 2006, Paris, France), p. 150 (2006)

Veröffentlichungen - 2005

J.-H. Klein-Wiele, J. Bekesi, J. Ihlemann, P. Simon:
„Nanostructuring with Femtosecond Excimer Laser Pulses”
in: “Excimer Laser Technology” D. Basting, G. Marowsky, Eds., Springer Verlag (2005)

J.-H. Klein-Wiele, J. Békési, J. Ihlemann, P. Simon:
„High speed fabrication of periodic nanostructures”
Proc. of the Third International WLT-Conference Lasers in Manufacturing, LIM 2005, p. 477

J. Bekesi, J.-H. Klein-Wiele, J. Ihlemann, P. Simon:
„Femtosecond UV Laser Manufacturing of Nano Structures”
German-Canadian Workshop “Laser in Manufacturing”, Munich, June 2005

J. Ihlemann, J.-H. Klein-Wiele, J. Bekesi and P. Simon:
„UV Ultrafast Laser Processing Using Phase Masks”
COLA 2005, 11.-16.9.2005, Banff, Canada

J.-H. Klein-Wiele, T. Nagy, P. Simon:
„Hollow-Fiber Pulse Compressor for KrF Lasers”
Appl. Phys B, DOI: 10.1007/s00340-005-2074-0 (2005)

T. Nagy, J.-H. Klein-Wiele, P. Simon:
„Towards the Generation of Energetic Sub-20 fs DUV Pulses”
Physics Colloquium, China Institute of Atomic Energy, Beijing, China,  December 2005

T.V. Murzina, F.Yu. Sychev, E.M. Kim, E.I. Rau, S.S. Obydena, O.A. Aktsipetrov, M.A. Bader, G. Marowsky:
„One-dimensional photonic crystals based on porous n-type silicon”, J. Appl. Phys. 98, 123702 (2005).

E.M. Kim, S.S. Elovikov, T.V. Murzina, A.A. Nikulin, O.A. Aktsipetrov, M.A. Bader, G. Marowsky:
„Surface-enhanced optical third-harmonic generation in Ag island films”, Phys. Rev. Lett. 95, 227402 (2005).

C. Kappel, A. Selle, M.A. Bader, G. Marowsky,:
„Double grating waveguide structures: 350-fold enhancement of two-photon fluorescence applying ultrashort pulses”, Sensors and Actuators B 107, 135-139 (2005).

S. Soria, A. Thayil, G. Badenes, M.A. Bader, A. Selle, G. Marowsky,:
„Resonant double grating waveguide structures as enhancement platforms for two-photon fluorescence excitation”, Appl. Phys. Lett. 87, 081109 (2005).

A. Thayil, S. Soria, G. Badenes, T. Katchalski, A.A. Friesem, A. Selle, M.A. Bader, G. Marowsky,
„Two-photon fluorescence spectroscopy by resonant single and double grating waveguide structures”, in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications, Systems and Technologies 2005 (Optical Society of America, Washington, 2005), CTuH2.

A. Selle, C. Kappel, M.A. Bader, G. Marowsky, K. Winkler, U. Alexiev,:
„Picosecond-pulse-induced two-photon fluorescence enhancement in biological material by application of grating waveguide structures”, Opt. Lett. 30, 1683-1685 (2005).

K. Winkler, A. Selle, C. Kappel, M.A. Bader, G. Marowsky, U. Alexiev:
„Picosecond pulse induced two-photon fluorescence enhancement in biological material applying grating waveguide structures”, Biophysical Society, 49th Annual Meeting, Long Beach, Californien, USA, Februar 12-16, 2005 (Vortrag).

K. Winkler, A. Selle, M.A. Bader, G. Marowsky, U. Alexiev:
„Picosecond pulse induced two-photon fluorescence enhancement in biological material applying grating waveguide structures: Towards the elucidation of MHC-Antigen recognition in living cells”, Joint meeting of Swiss and German Biophysicists: “Molecular basis of signal information and energy transduction in biomolecules”, Bonifatiuskloster, Hünfeld, Deutschland, Mai 5-7, 2005 (Vortrag).

T. Fricke-Begemann, M.A. Bader, J. Ihlemann, C. Kappel, J. Meinertz, A. Selle:
„Two-photon fluorescence: large area excitation and enhanced sensitivity using waveguide structures”, 106. Tagung der DGaO, Wroclaw, Polen, Mai 17-21, 2005 (Vortrag).

A. Thayil, S. Soria, G. Badenes, T. Katchalski, A.A. Friesem, A. Selle, M.A. Bader, G. Marowsky:„Two-Photon Fluorescence Spectroscopy by Resonant Single and Double Grating Waveguide Structures”, CLEO/QELS and PhAST 2005, Baltimore, Maryland, USA, Mai 22-27, 2005 (Vortrag).

Veröffentlichungen - 2004

J.-H. Klein-Wiele, J. Bekesi, P. Simon:
„Sub-Micron Machining of Solid Materials with Ultraviolet Femtosecond Pulses”
2nd European Conference on Applications of Femtosecond Lasers in Materials Science “FemtoMat”,  Bad Kleinkirchheim, Austria,  February 2004

Y. Prior, K. Zhang, V. Batenkov, Y. Paskover, J.-H. Klein-Wiele, P. Simon
„Optimized pulse duration for femtosecond laser ablation”
High-Power Laser Ablation 2004, SPIE International Conference, Taos, USA, April 2004, [5448‑151]

J.-H. Klein-Wiele, J. Bekesi, P. Simon:
„Sub-micron patterning of solid materials with ultraviolet femtosecond pulses”
Appl. Phys. A 79, 775-778 (2004)

J.-H. Klein-Wiele, J. Bekesi, P. Simon:
„Nanofabrication of solid materials with ultraviolet femtosecond pulses”
LPM 2004 - The 5th International Symposium on Laser Precision Microfabrication
Nara, Japan, May 2004

Jan-Hendrik Klein-Wiele, Jozsef Bekesi, Juergen Ihlemann, Peter Simon:
„Nanofabrication of solid materials with ultraviolet femtosecond pulses”
Proc. SPIE Vol. 5399, p. 139-146, (2004) Laser-Assisted Micro- and Nanotechnologies ‘03

P. Simon:
„The excimer laser as a short pulse amplifier – a powerful tool for the generation of high intensities and nano-scale structures”
Physics Colloquium, Vienna University of technology, Vienna, Austria, March 17 (2004)

P. Simon
„The excimer laser as a short pulse amplifier – a powerful tool for the generation of high intensities and nano-scale structures”
Physics Colloquium, Max Born Institute, Berlin, Germany,  May 5 (2004)

C. Kappel, A. Selle, M.A. Bader, G. Marowsky:
„Resonant double-grating waveguide structures as inverted Fabry-Perot interferometers”, J. Opt. Soc. Am. B 21, 1127-1136 (2004).

C. Kappel, A. Selle, T. Fricke-Begemann, M.A. Bader, G. Marowsky:
„Giant enhancement of two-photon fluorescence induced by resonant double grating waveguide structures”, Appl. Phys. B 79, 531-534 (2004).

C. Kappel, A. Selle, M.A. Bader, G. Marowsky:
„Double grating waveguide structures: 350-fold enhancement of two-photon fluorescence applying ultrashort pulses”, Sensors and Actuators B, in press (2004).

M.A. Bader, C. Kappel, A. Selle, J. Ihlemann, M.L. Ng, P.R. Herman:
„Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structures”, Proc. SPIE 5578, 559-567 (2004).

C. Kappel, A. Selle, M.A. Bader, G. Marowsky:
„Ultrashort-pulse behavior in resonant reflection filters”, Proc. SPIE 5577, 716-723 (2004).

E.M. Kim, S.S. Elovikov, T.V. Murzina, O.A. Aktsipetrov, M.A. Bader, G. Marowsky:
„Giant third optical harmonic generation in island silver films”, JETP Lett. 80, 527-531 (2004).

Yu.G. Fokin, T.V. Murzina, O.A. Aktsipetrov, S. Soria, G. Marowsky:
„Ferroelectric ordering and electroclinic effect in chiral smectic liquid crystals”, Phys. Rev. E 69, 031701 (2004).

M.G. Martemyanov, E.M. Kim, T.V. Dolgova, A.A. Fedyanin, O.A. Aktsipetrov, G. Marowsky:
„Third-harmonic generation in silicon photonic crystals and microcavities”, Phys. Rev. B 70, 073311 (2004).

S. Soria, T. Katchalski, E. Teitelbaum, A.A. Friesem, G. Marowsky:„Enhanced two-photon fluorescence excitation by resonant grating waveguide structures”, Opt. Lett. 29, 1989-1991 (2004).

Veröffentlichungen - 2003

J. Békési, J.-H. Klein-Wiele, D. Schäfer, J. Ihlemann, and P. Simon:
„Surface texturing of metals with sub-micron precision using a short pulse UV laser”
SPIE Vol. 4830, 497 (2003)

J. Bekesi, J.-H. Klein-Wiele, P. Simon:
„Efficient submicron processing of metals with femtosecond UV pulses”
Appl Phys A 76, 3, 355-357 (2003)

J.-H. Klein-Wiele, J. Bekesi, J. Ihlemann, P. Simon:
„Nano-fabrication of solid materials with ultraviolet femtosecond pulses”
X. International Conference on Laser-Assisted Micro- and Nanotechnologies, LAM-X, St. Petersburg, July 2003, invited talk

J.-H. Klein-Wiele, P. Simon:
„Sub-micron sized periodic 3-D surface structures generated by single femtosecond UV laser pulses”
Laser Precision Microfabrication, LPM 2003, June 2003, Munich

J.-H. Klein-Wiele, J. Bekesi, P. Simon:
„Sub-micron patterning of solid materials with ultraviolet femtosecond pulses”
7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, October 2003, invited talk

C. Dölle, C. Reinhardt, P. Simon, B. Wellegehausen,
„Spectral phase matching for highly efficient frequency tripling of short-pulse KrF laser radiation in argon”
Appl. Phys. B 76, 891-895 (2003)

J. Békési, D. Schäfer, J. Ihlemann, and P. Simon,
„Fabrication of diffractive optical elements by ArF laser ablation of fused silica”
SPIE Vol. 4977, 235 (2003)

J.-H. Klein-Wiele, P. Simon:
„Fabrication of periodic nanostructures by phase-controlled multiple-beam interference”
Applied Physics Letters 83, 4707-4709 (2003)

J.-H. Klein-Wiele, P. Simon:„Fabrication of periodic nanostructures by phase-controlled multiple-beam interference”Virtual Journal of Nanoscale Science & Technology Volume 8, Issue 24 “Advances in Fabrication and Processing”