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High resolution patterning of sapphire by F2-laser ablation Applied Physics A 103, 51 (2011) J. Richter, J. Meinertz, J. Ihlemann Patterned laser annealing of silicon oxide films Applied Physics A, DOI: 10.1007/s00339-011-6451-8 M. Wiesner, J.Ihlemann Fabrication of Sapphire Micro Optics by F2-Laser Ablation Physics Procedia 12, 239 (2011) K. Christou, I. Knorr, J. Ihlemann, H. Wackerbarth, V. Beushausen Fabrication and Characterization of Homogeneous SERS-Substrates by Single Pulse UV-Laser Treatment of Gold and Silver Films Langmuir 26, 18564 (2010) J. Bekesi, J. Kaakkunen, W. Michaeli, F. Klaiber, M. Schoengart, J. Ihlemann, P. Simon Fast Fabrication of Super-hydrophobic Surfaces on Polypropylene by replication of short pulse laser structured molds Applied Physics A 99, 691 (2010) T. Fricke-Begemann, J. Ihlemann Microstructured GRIN lens as an external coupler to thin-film waveguides Proceedings LPM2010, paper #10-80 M. Wiesner, H.H. Müller, E. Lankenau, G. Hüttmann, J. Ihlemann Laser micromachining process control by optical coherence tomography Proceedings LPM2010, paper #10-41 J. Ihlemann, R. Weichenhain-Schriever Laser induced congruent forward transfer of SiOx-layers Applied Physics A 101, 483 (2010) M. Jahn, J. Richter, R.Weichenhain-Schriever, J. Meinertz, J. Ihlemann Ablation of silicon suboxide thin layers Applied Physics A 101, 533 (2010) J. Kaakkunen, J. Bekesi, J. Ihlemann, P. Simon Ablation of microstructures applying diffractive elements and UV femtosecond laser pulses Applied Physics A 101, 225 (2010) J. Ihlemann Laser Micromachining In: Laser Materials Processing – Fundamentals, Applications and Developments, P. Schaaf Editor, Springer Series in Materials Science 139, 169-187, Springer-Verlag, Berlin Heidelberg 2010 T. Fricke-Begemann, J. Ihlemann Direct light-coupling to thin-film waveguides using a grating-structured GRIN lens Optics Express 18, 19860 (2010) J. Ihlemann Micromachining and patterning In: Laser Precision Microfabrication, K. Sugioka, M. Meunier, A. Piqué Editors Springer Series in Materials Science 135, 239-257, Springer-Verlag, Berlin Heidelberg 2010 R. Bäumner, L. Bonacina, J. Enderlein, J. Extermann, T. Fricke-Begemann, G. Marowsky, J.-P. Wolf Evanescent-field-induced second harmonic generation by noncentrosymmetric nanoparticles Optics Express 22, 23218 (2010) J. Zinn, M. Schütte, J. Meinertz, J. Ihlemann F2-laser fabrication of fiber-integrated optical elements Journal of Laser Micro/Nanoengineering 5, 6 (2010) B. Borchers, J. Bekesi, P. Simon, J. Ihlemann Sub micron surface patterning by laser ablation with short UV pulses using a proximity phase mask setup Journal of Applied Physics 107, 063106 (2010) M. Wiesner, J. Ihlemann, H.H. Müller, E. Lankenau, G. Hüttmann Optical coherence tomography for process control of laser micro machining Review of Scientific Instruments 81, 033705 (2010) P. Zahariev, N. Mechkarov, G. Danev, J. Ihlemann Excimer laser induced micro bumps on preheated BK7-glass Applied Physics A 95, 639 (2009) J. Ihlemann, R. Weichenhain-Schriever Laser Based Rapid Fabrication of SiO2-phase Masks for Efficient UV-laser Micromachining Journal of Laser Micro/Nanoengineering 4, 100 (2009) T. Fricke-Begemann, R. Bäumner, K. Bodensiek, A. Selle Coupling efficiency of fluorescent molecules to a sensing waveguide DGaO Proceedings 2009 – http://www.dgao-proceedings.de – ISSN: 1614-8436 R. Bäumner, K. Bodensiek, A. Selle, T. Fricke-Begemann, J. Ihlemann, G. Marowsky Efficiency of fluorescence coupling into planar waveguides Proc. SPIE 7368-26 (2009) J. Zinn, M. Schütte, J. Meinertz, J. Ihlemann F2-laser fabrication of fiber-integrated optical elements Proceedings of LAMP2009 - the 5th International Congress on Laser Advanced Materials Processing J. Bekesi, J. Kaakkunen, J. Meinertz, T. Omairi, J. Ihlemann, P. Simon Rapid Fabrication of Functional Surfaces by Parallel Laser Processing Using DOEs Proceedings of LAMP2009 - the 5th International Congress on Laser Advanced Materials Processing Martin Jahn Untersuchung der Laserablation dünner Metall- und Oxidschichten in unterschiedlichen Umgebungsmedien Bachelorarbeit, TU Ilmenau, 2009 J. Dou, J. Li, P.R. Herman, J.S. Aitchison, T. Fricke-Begemann, J. Ihlemann, G. Marowsky Laser machining of micro-lenses on the end face of single-mode optical fibers Applied Physics A 91, 591 (2008) J. Ihlemann Micro patterning of fused silica by laser ablation mediated by solid coating absorption Applied Physics A 93, 65 (2008) J. Bekesi, J. Meinertz, J. Ihlemann, P. Simon Fabrication of large-area grating structures through laser ablation Applied Physics A 93, 27 (2008) J. Ihlemann, R. Weichenhain-Schriever Laser based rapid fabrication of SiO2-phase masks for efficient UV-laser micromachining Proceedings LPM 2008 J. Ihlemann, J. Békési, J.-H.Klein-Wiele, P.Simon Processing of dielectric optical coatings by nanosecond and femtosecond UV laser ablation Laser Chemistry (2008) Johannes Richter Untersuchungen zur Laserablation und zur laserinduzierten Oxidation von SiOx-Schichten Bachelorarbeit, Göttingen 2008 Inga Knorr Nanostrukturierung metallischer Oberflächen und deren Anwendung für die oberflächenverstärkte Ramanspektroskopie Diplomarbeit, Göttingen 2008 Kai Bodensiek Angeregte Fluoreszenz und deren Rückkopplung auf planaren Wellenleitern Diplomarbeit, Göttingen 2008 André Selle Dielektrische Wellenleitergitter in Resonanz: Theorie, Charakterisierung und Anwendung Dissertation, Göttingen 2008 Jürgen Ihlemann, Malte Schulz-Ruhtenberg, Thomas Fricke-Begemann Micro patterning of fused silica by ArF- and F2-laser ablation Journal of Physics: Conference Series 59, 206 (2007) J. Ihlemann, J.-H. Klein-Wiele, J. Bekesi and P. Simon UV Ultrafast Laser Processing Using Phase Masks Journal of Physics: Conference Series 59, 449 (2007) Nils Mainusch, Christina Pflugfelder, Jürgen Ihlemann, Wolfgang Viöl Plasma-jet Coupled with Nd:YAG Laser: New Approach to Surface Cleaning Plasma Processes and Polymers 4, S33 (2007) J. Ihlemann UV-laser ablation of fused silica mediated by solid coating absorption Proc. SPIE Vol. 6458A, paper # 14 (2007) J. Ihlemann, J.-H. Klein-Wiele, J. Békési, P. Simon SiO2 phase gratings fabricated by UV laser ablation patterning Proc. SPIE Vol. 6462B, paper # 41 (2007) J. Li, J. Dou, P.R. Herman, T. Fricke-Begemann, J. Ihlemann, G. Marowsky Deep ultraviolet Laser micromachining of novel fibre optic devices Journal of Physics: Conference Series 59, 691 (2007) M. Rauh, J. Ihlemann, A. Koch Laser Surface Roughening of PTFE for Increased Bonding Strength Applied Physics A 88, 231 (2007) Jozsef Békési, Jörg Meinertz, Jürgen Ihlemann and Peter Simon Grating Interferometers for Efficient Generation of Large Area Grating Structures via Laser Ablation Journal of Laser Micro/Nanoengineering 2, 221 (2007) M.A. Bader, A. Selle, O. Stenzel, R. Delmdahl. G. Spiecker, C. Fischer High spectral resolution analysis of tunable narrowband resonant grating waveguide structures Applied Physics B 89, 151 (2007) R.F. Delmdahl, G. Spiecker, M.A. Bader, A. Selle Spectral resolution analysis of resonant grating waveguides Materialwissenschaft und Werkstofftechnik 38 (3), 218 (2007) Manuel Schütte Herstellung und Charakterisierung optisch funktionaler Oberflächen auf Faserendflächen Masterarbeit, Göttingen 2007 M.A. Bader, C. Kappel, A. Selle, J. Ihlemann, M.L. Ng, P.R. Herman F2-laser machined submicrometer gratings in thin dielectric films for resonant waveguide applications Applied Optics 45, 6586 (2006) J.-H. Klein-Wiele, J. Békési, P. Simon, J. Ihlemann Fabrication of SiO2 phase gratings by UV laser patterning of siliconsuboxide layers and subsequent oxidation Online Proceedings of LAMP 2006 T. Fricke-Begemann, J.Ihlemann, J. Meinertz Diffraktive Mikrolinsen: Herstellung durch direkte Laserablation DGaO-Proceedings P16 (2006) T. Fricke-Begemann, J. Bertram, M. Hottenrott, J. Ihlemann, R. Weichenhain-Schriever Modularer Fluoreszenz-Reader zur parallelen Analyse von Protein-Chips In: Technische Systeme für Biotechnologie und Umwelt, D. Beckmann, M. Meister Hrsg., Tagungsband des 13. Heiligenstädter Kolloquium, 2006, S. 149-153 J.-H. Klein-Wiele, J. Békési, P. Simon, J. Ihlemann Fabrication of SiO2 phase gratings by UV laser patterning of silicon suboxide layers and subsequent oxidation Journal of Laser Micro/Nanoengineering 1, 221 (2006) T. Fricke-Begemann, J. Meinertz, J. Ihlemann Fabrication of diffractive micro lenses by direct laser ablation Proceedings of the EOS Topical Meeting on Micro-Optics, Diffractive Optics and Optical MEMS (17 - 19 October 2006, Paris, France), p. 114 (2006) J. Ihlemann, J.-H. Klein-Wiele, J. Békési, P. Simon Laser fabricated SiO2 phase gratings for high resolution surface patterning Proceedings of the EOS Topical Meeting on Micro-Optics, Diffractive Optics and Optical MEMS (17 - 19 October 2006, Paris, France), p. 150 (2006) Markus Wiesner Entwicklung eines Messsystems zur Charakterisierung von partiell kohärenten Strahlungsquellen Masterarbeit, Göttingen 2006 J. Ihlemann UV laser ablation patterning of oxide films for optical applications Optical Engineering 44, 051108 (2005) Malte Schulz-Ruhtenberg, Jürgen Ihlemann, Jörg Heber Laser patterning of SiOX-layers for the fabrication of diffractive phase elements for deep UV applications Appl. Surf. Sci. 248, 190 (2005) F. Balzer, J. Ihlemann, A.C. Simonsen, H.-G. Rubahn UV Laser cutting of organic nanofibers Proc. SPIE Vol. 5720, 165 (2005) M. Wehner, M. Hessling, J. Ihlemann Ablative Micro Fabrication in: Excimerlaser Technology, D. Basting, G. Marowsky, Eds., Springer Verlag (2005) J.-H. Klein-Wiele, J. Békési, J. Ihlemann, P. Simon Nano-structuring by femtosecond excimer laser pulses in: Excimerlaser Technology, D. Basting, G. Marowsky, Eds., Springer Verlag (2005) T. Fricke-Begemann, J. Li, J. Dou, J. Ihlemann, P.R. Herman, G. Marowsky Laser machining of micro-lenses on the end face of optical fibers Proc. of the Third International WLT-Conference Lasers in Manufacturing, LIM 2005, p. 733 A. Selle, C. Kappel, M.A. Bader, G. Marowsky, K. Winkler, U. Alexiev Picosecond-pulse-induced two-photon fluorescence enhancement in biological material by application of grating waveguide structures Optics Letters 30, 1683-1685 (2005) J.-H. Klein-Wiele, J. Békési, J. Ihlemann, P. Simon High speed fabrication of periodic nanostructures Proc. of the Third International WLT-Conference Lasers in Manufacturing, LIM 2005, p. 477 J. Ihlemann Patterning of oxide thin films by UV laser ablation Journal of Optoelectronics and Advanced Materials 7, 1191 (2005) T. Fricke-Begemann, R. Weichenhain-Schriever, J. Ihlemann, G. Marowsky Mikrolinsen auf Glasfasern Laser + Photonik 2/2005, 24 T. Fricke-Begemann, M.A. Bader, J. Ihlemann, C. Kappel, J. Meinertz, A. Selle Two-photon fluorescence: large area excitation and enhanced sensitivity using waveguide structures Proc. DGaO 2005, B24 J. Heber, J. Ihlemann, M. Schulz-Ruhtenberg, J. Schmidt Laser ablation of SiOX thin films for direct mask writing Proc. SPIE Vol. 5963, 594 (2005) Manuel Rauh UV-Laser-Mikrostrukturierung von Polytetrafluorethylen für biophysikalische Anwendungen Masterarbeit, Göttingen 2005 J. Ihlemann, D. Schäfer Patterning of optical coatings by laser ablation for the fabrication of dielectric masks and diffractive phase elements Journal of Microlithography, Microfabrication and Microsystems 3, 455 (2004) F. Beinhorn, J. Ihlemann, K. Luther, J. Troe Plasma effects in picosecond-femtosecond UV laser ablation of polymers Applied Physics A 79, 869 (2004) J.-H. Klein-Wiele, J. Bekesi, J. Ihlemann, P. Simon Nano-Fabrication of Solid Materials with Ultraviolet Femtosecond Pulses Proc. SPIE Vol. 5399, 139 (2004) Yu. Kaganovskii, I. Antonov, M. Rosenbluh, J. Ihlemann, and A. A. Lipovskii Two- and three-dimensional photonic crystals produced by pulsed laser irradiation in silver-doped glass Solid State Phenomena 99-100, 65 (2004) K. Rubahn, J. Ihlemann, G. Jakopic, A.C. Simonsen, H.-G. Rubahn UV laser induced grating formation in PDMS thin films Applied Physics A 79, 1715 (2004) J. Ihlemann, F. Beinhorn, H. Schmidt, K. Luther, J. Troe Plasma and plume effects on UV laser ablation of polymers Proc. SPIE Vol. 5448, 572 (2004) T. Fricke-Begemann, J. Ihlemann, R. Weichenhain Mikrooptiken zur Verbesserung eines optischen Abstandsensors und Mikrofon Proc. DGaO 2004 Jürgen Ihlemann, Malte Schulz-Ruhtenberg, Thomas Fricke-Begemann UV-Laserablation von Quarzglas zur Herstellung diffraktiver optischer Elemente Proc. DGaO 2004 Thomas Fricke-Begemann, Jürgen Ihlemann, Gerd Marowsky, Jianzhao Li, Peter R. Herman Micro-lens machining on optical fibers by direct laser ablation Proc. SPIE Vol. 5578, 589 (2004) M.A. Bader, C. Kappel, A. Selle, J. Ihlemann, M.L. Ng, P.R. Herman Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structures Proc. SPIE Vol. 5578, 559 (2004) G. Marowsky, M. A. Bader, A. Selle, C. Kappel, T. Fricke-Begemann, J. Meinertz, J. Ihlemann Neue Perspektiven der Zwei-Photonen-Technologie In: Technische Systeme für Biotechnologie und Umwelt, D. Beckmann, M. Meister Hrsg., Tagungsband des 12. Heiligenstädter Kolloquium, 2004, S. 119 C. Kappel, A. Selle, T. Fricke-Begemann, M.A. Bader, G. Marowsky Giant enhancement of two-photon fluorescence induced by resonant double grating waveguide structures Applied Physics B 79, 531 (2004) J. Ihlemann, S. Müller, S. Puschmann, D. Schäfer, M. Wei, J. Li, P.R. Herman Fabrication of submicron gratings in fused silica by F2-laser ablation Applied Physics A 76, 751 (2003) Jürgen Ihlemann, Sabine Müller, Stefan Puschmann, Dirk Schäfer, Peter R. Herman, Jianzhao Li, Midori Wei F2-laser microfabrication of sub-µm gratings in fused silica Proc. SPIE Vol. 4941, 94 (2003) József Békési, J.-H. Klein-Wiele, D. Schäfer, J. Ihlemann, P. Simon Surface texturing of metals with sub-micron precision using a short pulse UV laser Proc. SPIE Vol. 4830, 497 (2003) Yu. Kaganovskii, I. Antonov, D. Ianetz, M. Rosenbluh, J. Ihlemann, S. Müller, G. Marowsky, A.A. Lipovskii Mass transfer in optical nanocomposites induced by pulsed laser irradiation Solid State Phenomena 94, 105-114 (2003) M. Behdani, S.H. Keshmiri, S. Soria, M.A. Bader, J. Ihlemann, G. Marowsky, Th. Rasing Alignment of liquid crystals with periodic submicron structures ablated in polymeric and indium tin oxide surfaces Applied Physics Letters 82, 2553 (2003) G. Danev, E. Spassova, J. Assa, I. Karamancheva, A. Paskaleva, K. Popova, J. Ihlemann Properties of vacuum-deposited polyimide films Vacuum 70, 37 (2003) Yu. Kaganovskii, I. Antonov, D. Ianetz, M. Rosenbluh, J. Ihlemann, S. Müller, G. Marowsky, A.A. Lipovskii Optical recording in silver-doped glasses by a femtosecond laser Applied Physics Letters 83, 554 (2003) József Békési, Dirk Schäfer, Jürgen Ihlemann, Peter Simon Fabrication of diffractive optical elements by ArF-laser ablation of fused silica Proc. SPIE Vol. 4977A, 235 (2003) Jürgen Ihlemann, Dirk Schäfer Laser ablation patterning of layered systems - a method to fabricate dielectric masks and diffractive phase elements Proc. SPIE Vol. 4984, 219 (2003) Peter R. Herman, Jianzhao Li, Amir H. Nejadmalayeri, Mi Li Ng, Andrew Yick, J. Ihlemann Nano-milling of diffractive optics by F2-laser ablation CLEO/Europe 2003, Technical Digest Malte Schulz-Ruhtenberg, Jürgen Ihlemann, Gerd Marowsky, Amir H. Nejadmalayeri, Mi L. Ng, Jianzhao Li, Peter R. Herman Fabrication of diffractive phase elements by F2-laser ablation of fused silica Proc. SPIE Vol. 5063, 113 (2003) Peter R. Herman, Jianzhao Li, Kevin P. Chen, Midori Wei, Jie Zhang, Jürgen Ihlemann, Dirk Schäfer, Gerd Marowsky, Peter Oesternlin, Berthold Burghardt F2-Lasers: High resolution micromachining system for shaping photonic components Zugo Photonics “Insights”, Vol. 2, Issue 2, August 2003 Malte Schulz-Ruhtenberg Untersuchung der Photoablation von Quarzglas mit ArF- und F2-Excimerlasern Diplomarbeit, Universität Göttingen, 2003 |
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